Fabrication of amorphous silicon microgap structure for energy saving devices

Dhahi, T.H.S and Hashim, U and Ali, M.E and Nazwa, T (2012) Fabrication of amorphous silicon microgap structure for energy saving devices. Sains Malaysiana, 41 (6). pp. 755-759. ISSN 0126-6039


Official URL: http://www.ukm.my/jsm/contents.html


We report here the fabrication of microgaps electrodes on amorphous silicon using low cost techniques such as vacuum deposition and conventional lithography. Amorphous silicon is a low cost material and has desirable properties for semiconductor applications. Microgap electrodes have important applications in power saving devices, electrochemical sensors and dielectric detections of biomolecules. Physical characterization by scanning electron microscopy (SEM) demonstrated such microgap electrodes could be produced with high reproducibility and precision. Preliminary electrical characterizations showed such structures are able to maintain a good capacitance parameters and constant current supply over a wide ranging differences in voltages. They have also good efficiency of power consumption with high insulation properties.

Item Type:Article
Keywords:Dielectric detection of biomolecule; microgap electrodes; power saving devices
Journal:Sains Malaysiana
ID Code:4863
Deposited By: Mr Azam
Deposited On:25 May 2012 12:54
Last Modified:14 Dec 2016 06:37

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