Number of items: 1.
Article
Siti Azlina Rosli, and Azlan Abdul Aziz, and Md Roslan Hashim,
(2011)
ICP-RIE dry etching using Cl2-based on GaN.
Sains Malaysiana, 40
(1).
pp. 79-82.
ISSN 0126-6039
This list was generated on Tue Jan 28 20:11:37 2025 MYT.