Number of items: 1.
Article
Sabar D. Hutagalung, and Kam, Chung Lew and Darsono, Teguh
(2014)
Nanoscale patterning by AFM lithography and its application
on the fabrication of silicon nanowire devices.
Sains Malaysiana, 43
(2).
pp. 267-272.
ISSN 0126-6039
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